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Coherent COMPex Pro 205 Excimer Laser

 

KrF, Wavelength: 248nm, Pulse duration:30ns

Rep rate: 50Hz, Max pulse energy: 700mJ

 

 

Left:  Laser cavity

 

Right:  Beam delivery system sync with 2-D motion stage. Homogenization and mask-projection system

 

 

 

  

 

 

 

SPI redEnergy G4 Fiber Laser

 

Wavelength:1064nm, Pulse duration: 41ns

Max CW Power: 20W, Max Pulse Energy: 0.60mJ

 

Left: Laser cavity

 

Right: Fiber Delivery System

Objective lens processing, 2-D motion stage sync with laser

 

 

 

 

 

ESI Model 3572 Nd:YAG laser

 

Tunable wavelengths: 1064/355nm, Pulse duration: 50ns

Max rep rate: 1kHz, Q-switched

Max Power @ 1064nm CW 5.25W

Max Energy @ 355nm pulsed 0.42mJ 

 

Left: Laser cavity

 

Right: Beam Delivery System:

Beam expander, Objective lens processing

2-D motion stage synced with laser

 

 

 

 

 

 

Spectra-Physics Hurricane System

Ti:Sapphire femtosecond laser

 

Wavelength: 800nm, Pulse duration:130fs

Rep rate: 1kHz, Max pulse energy: 0.5mJ

 

Left: Regenerative amplifier system

 

Right" Beam Delivery System, 40X objective lens processing

Videoing system for focus calibration

 

 

 

PRC SL-1500 CO2 Laser

 

Wavelength:10.6μm

Power: 3500W @ CW, 10kW @ Pulsed

 

Left: Laser cavity

 

Right: X-Y Linear Motion Table, Beam Delivery System

Lens protection gas

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Continuum NY61 Laser


 
Nd:YAG
 
Wavelength:  1064 nm
Max Rep Rate:  20 Hz
Pulse Duration:  17 ns
Max Pulse Energy:  320 mJ

 

 

 

 

GSI Lumonics JK-2000

 Nd:YAG Laser

 

Wavelength:1064nm, Max Power: 2kW  

Operating mode: CW/chopped, Min beam diameter: 0.8mm

 

Left: Laser cavity

 

Right: Fiber beam delivery system

Synced with Staubli robotic arm

 

 

 

 

Staubli RX-130 Robot

 

6 DOF

Resolution: 0.1mm

Sync with JK-2000 Nd:YAG laser

 

 

Olympus BX-60

Optical Microscopy

 

Specs: Ref./Tran Mode

Max magnification: 100X

MPlan/UPlan/MplanAPo lens

Differential interference contrast(DIC)

Hamamatsu C8484-05G Digital Camera

Olympus DP10 Color Digital Camera

 

   

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

ThermoImager TIM 160

Measuring ranges -20 - 100C, 0 - 250 C, 150 - 900 C

Optical resolution 160 x 120 pixels

Spectral range 7.6 - 13μ

Exchangeable lenses 23,48

 

 

 

TORMACH PCNC 1100

Personal CNC Mill

 

5140RPM 1.5HP R8 Spindle

sensorless vector control  

exclusive foldback logic

 

Carbolite CTF-12/65/550

Tube Furnace

 

Max Temp: 1200˚C

Max rate: 5 ˚C/min

Vacuuming system

 

 

 

     

 

 

Additional equipment accessible in the Materials Research Science and Engineering Center (MRSEC):

Transmission Electron Microscope

 

 

 

Scintag X-Ray Diffractometer (XRD)

 

 

X-Ray Photoelectron Microscope (XPS)

 

 

 

Woollam Ellipsometer

 

Fourier Transform Infrared Spectroscope (FTIR)

 

 

 

Hitachi S-4700 SEM